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Full-auto UV irradiation machine

Full-auto UV irradiation machine

Full-auto UV irradiation machine

The blacklight specification full-auto UV irradiation machine automatically retrieves wafer frames supplied by cassettes and performs UV irradiation and storage. After dicing, UV irradiation is applied to reduce the adhesive strength of the tape for easier pickup. It supports automatic setup for 8-inch and 12-inch wafer frames.

  • Other semiconductor manufacturing equipment
  • Fully automatic UV irradiation device

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